Ion chemistry in silane dc discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335702
Reference30 articles.
1. Mass spectrometry of a silane glow discharge during plasma deposition of a-Si: H films
2. Ionic species in a silane plasma
3. Ionic species in a silane plasma
4. Epitaxial alignment of polycrystalline Si films on (100) Si
5. Epitaxial alignment of polycrystalline Si films on (100) Si
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