Ionic species in a silane plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91907
Reference9 articles.
1. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
2. Optical properties and hydrogen concentration in amorphous silicon
3. The Effect of Hydrogen Content on the Photovoltaic Properties of Amorphous Silicon
4. Plasma preparations of amorphous silicon films
5. Luminescence studies of plasma-deposited hydrogenated silicon
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