Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1464224
Reference8 articles.
1. Design and integration considerations for end-of-the roadmap ultrashallow junctions
2. Spreading resistance:A quantitative tool for process control and development
3. Application of Multilayer Potential Distribution to Spreading Resistance Correction Factors
4. Comparison of carrier profiles from spreading resistance analysis and from model calculations for abrupt doping structures
5. Quantitative analysis of on bevel electrical junction shifts due to carrier spilling effects
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