Characterization of electrically active dopant profiles with the spreading resistance probe-Reference-Cited by-同舟云学术

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Characterization of electrically active dopant profiles with the spreading resistance probe

Published:2004-12-31 Issue:5-6 Volume:47 Page:123-206
ISSN:0927-796X
Container-title:Materials Science and Engineering: R: Reports
language:en
Short-container-title:Materials Science and Engineering: R: Reports

Author:

CLARYSSE T,VANHAEREN D,HOFLIJK I,VANDERVORST W

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

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