Influence of argon and oxygen on charge-state-resolved ion energy distributions of filtered aluminum arcs
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2206413
Reference27 articles.
1. Ion flux from vacuum arc cathode spots in the absence and presence of a magnetic field
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5. Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma;Thin Solid Films;2017-11
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