Formation of ${\mathrm{Cu}}_{n}^{+}$ ($n=1-3$), ${\mathrm{Ar}}_{n}^{+}$ (n = 1, 2), and ArCu+ ions during sputtering of a copper surface by low-energy Ar+ ion bombardment in a dilute argon atmosphere
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Published:2018-06-29
Issue:6
Volume:27
Page:065010
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Hippler RainerORCID,
Denker Christian
Subject
Condensed Matter Physics
Cited by
4 articles.
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