Ellipsometric characterization of damage profiles using an advanced optical model
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1539306
Reference12 articles.
1. Determination of complex dielectric functions of ion implanted and implanted‐annealed amorphous silicon by spectroscopic ellipsometry
2. Analysis of ion-implanted GaAs by spectroscopic ellipsometry
3. Nondestructive depth profiling by spectroscopic ellipsometry
4. Spectroscopic ellipsometry: A new tool for nondestructive depth profiling and characterization of interfaces
5. Comparative investigation of damage induced by diatomic and monoatomic ion implantation in silicon
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