Low-voltage InGaZnO thin-film transistors with Al2O3 gate insulator grown by atomic layer deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3118575
Reference14 articles.
1. Recent advances in ZnO transparent thin film transistors
2. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
3. High-performance InGaZnO thin-film transistors with high-k amorphous Ba0.5Sr0.5TiO3 gate insulator
4. Low-Temperature Al2O3 Atomic Layer Deposition
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