Realization of direct bonding of single crystal diamond and Si substrates
Author:
Affiliation:
1. Electronic Information System, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi, Osaka 558-8585, Japan
2. Department of Electrical and Electronic Engineering, Saga University, Honjo-machi 1, Saga 840-8502, Japan
Funder
Ministry of Education, Culture, Sports, Science and Technology (MEXT)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference21 articles.
1. A. T. Collins , in Properties and Growth of Diamond, edited by G. Davies ( Inspec, London, 1994).
2. High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond
3. Electron effective masses and lattice scattering in natural diamond
4. Hole-drift velocity in natural diamond
5. E. Kohn and W. Ebert , in Low-Pressure Synthetic Diamond, edited by B. Dishcler and C. Wild ( Springer, Berlin, 1998).
Cited by 58 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Understanding of multiway heat extraction using peripheral diamond in an AlGaN/GaN high electron mobility transistor by electrothermal simulations;Semiconductor Science and Technology;2024-06-07
2. XPS analysis of molecular contamination and sp2 amorphous carbon on oxidized (100) diamond;Materials for Quantum Technology;2024-06-01
3. Strained diamond for quantum sensing applications;Materials for Quantum Technology;2024-05-31
4. Evolutionary features of subsurface defects of single crystal diamond after dynamic friction polishing;Functional Diamond;2024-03-13
5. Progress in the semiconductor/diamond heterogeneous integrations: Technical methods, interfacial phonon transport, and thermal characterizations;Surfaces and Interfaces;2024-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3