Development and plasma characterization of an 850 MHz surface-wave plasma source-Reference-Cited by-同舟云学术

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Development and plasma characterization of an 850 MHz surface-wave plasma source

Published:2017-10 Issue:10 Volume:7 Page:105213
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Sahu B. B.¹,Koga S.²,Toyoda H.²,Han Jeon G.¹

Affiliation:

1. NU-SKKU Joint Institute for Plasma Nano Materials (IPNM), Center for Advanced Plasma Surface Technology (CAPST), Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Korea

2. Department of Electrical Engineering and Computer Science, Plasma Nanotechnology Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

Funder

Korea Institute for Advancement of Technology

Ministry of Science, ICT and Future Planning

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4995442

Reference72 articles.

1. Fabrication of ultrathin Ni–Zn ferrite films using electron cyclotron resonance sputtering method

2. Development and studies on a compact electron cyclotron resonance plasma source

3. Studies on plasma production in a large volume system using multiple compact ECR plasma sources

4. Development of large diameter ECR plasma source

5. Evidence of current free double layer in high density helicon discharge

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1. Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma*;Chinese Physics B;2021-09-01

2. A Linear Microwave Plasma Source Using a Circular Waveguide Filled with a Relatively High-Permittivity Dielectric: Comparison with a Conventional Quasi-Coaxial Line Waveguide;Applied Sciences;2021-06-09

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4. Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiNx:H films using RF-near microwave PECVD;Physics of Plasmas;2018-02

5. A review on plasma combustion of fuel in internal combustion engines;International Journal of Energy Research;2017-12-22

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