Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1354633
Reference30 articles.
1. Pulse-time modulated plasma discharge for highly selective, highly anisotropic and charge-free etching
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