Global Model of Plasma Chemistry in a High Density Oxygen Discharge-Reference-Cited by-同舟云学术

Global Model of Plasma Chemistry in a High Density Oxygen Discharge

Published:1994-06-01 Issue:6 Volume:141 Page:1546-1555
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Lee C.¹²³,Graves D. B.¹²³,Lieberman M. A.¹²³,Hess D. W.¹²³

Affiliation:

1. Department of Chemical Engineering, University of California, Berkeley, California 94720

2. Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California, 94720

3. Department of Chemical Engineering, Lehigh University, Bethlehem, Pennsylvania, 18015

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2054960/pdf

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