An evaluation of Fuchs-Sondheimer and Mayadas-Shatzkes models below 14nm node wide lines
Author:
Affiliation:
1. GLOBALFOUNDRIES at Albany Nanotech, Albany, New York 12203, USA
2. IBM at Albany Nanotech, Albany, New York 12203, USA
3. IBM Research, Yorktown Heights, New York 10598, USA
Funder
International Business Machines Corporation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5063896
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