Titanium and nickel silicide formation afterQ‐switched laser and multiscanning electron beam irradiation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.330651
Reference17 articles.
1. Laser‐induced reactions of platinum and other metal films with silicon
2. Dynamics of laser‐induced formation of palladium silicide
3. Silicide formation using a scanning cw laser beam
4. Structure and growth kinetics of Ni2Si on silicon
5. Nucleation‐controlled thin‐film interactions: Some silicides
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