Funder
Nano Material Technology Development program
Basic Science Research program
National Research Foundation of Korea
Ministry of Education
Ministry of Science, ICT & Future Planning
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference37 articles.
1. Laser annealing of ion-implanted semiconductors;White;Science,1979
2. Ultra shallow junctions formed by sub-melt laser annealing;Falepin,2005
3. Defect evolution and dopant activation in laser annealed Si and Ge;Cristiano;Mater. Sci. Semicond. Process.,2016
4. Laser spike annealing for n-type Ge junction & Ti silicide formation;Wang;IEEE Int. Conf. Workshop Junct. Tech. (IWJT),2014
5. Liquid phase epitaxy of cubic FeSi2 on (111) Si induced by pulsed laser irradiation;Grimaldi;Appl. Phys. Lett.,1992
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