Interaction of deuterium gas with dry SiO2on Si: An ion‐beam study
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338284
Reference32 articles.
1. The Role of Hydrogen in SiO2 Films on Silicon
2. Diffusion of radiolytic molecular hydrogen as a mechanism for the post‐irradiation buildup of interface states in SiO2‐on‐Si structures
3. Annealing of surface states in polycrystalline‐silicon–gate capacitors
4. ESR centers, interface states, and oxide fixed charge in thermally oxidized silicon wafers
5. An electron spin resonance study of radiation‐induced electrically active paramagnetic centers at the Si/SiO2interface
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