Tungsten nanocrystal memory devices improved by supercritical fluid treatment
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2803937
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3. Oxygen plasma immersion ion implantation treatment to enhance data retention of tungsten nanocrystal nonvolatile memory;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-03
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