Selective epitaxy in the conventional metalorganic vapor phase epitaxy of GaAs
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100805
Reference16 articles.
1. Selective growth of GaAs in the MOMBE and MOCVD systems
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3. Selective MOCVD epitaxy for optoelectronic devices
4. Selective area growth of gallium arsenide by metalorganic vapor phase epitaxy
5. Selective metalorganic chemical vapour deposition for GaAs planar technology
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