Ion debris characterization from a z-pinch extreme ultraviolet light source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2175471
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1. Spherical Electrostatic Analyzer for Measurement of Nuclear Reaction Energies
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4. Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography
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