Ion debris characterization from a z-pinch extreme ultraviolet light source

Author:

Antonsen Erik L.,Thompson Keith C.,Hendricks Matthew R.,Alman Darren A.,Jurczyk Brian E.,Ruzic D. N.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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5. Magnetic debris mitigation system for extreme ultraviolet sources;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-02-09

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