Localized laser etching of compound semiconductors in aqueous solution
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93113
Reference12 articles.
1. Improved performance of GaAs microwave field-effect transistors with low inductance via-connections through the substrate
2. Photoelectrochemical etching ofp‐GaAs
3. Voltage‐controlled photoetching of GaAs
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