The critical role of growth temperature on the structural and electrical properties of AlGaN/GaN high electron mobility transistor heterostructures grown on Si(111)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3063698
Reference35 articles.
1. 12 W/mm AlGaN–GaN HFETs on Silicon Substrates
2. Output power density of 5.1/mm at 18 GHz with an AlGaN/GaN HEMT on Si substrate
3. Molecular Beam Epitaxy of Group-III Nitrides on Silicon Substrates: Growth, Properties and Device Applications
4. In situ measurements of wafer bending curvature during growth of group-III-nitride layers on silicon by molecular beam epitaxy
5. Buffer free direct growth of GaN on 6H–SiC by metalorganic vapor phase epitaxy
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1. Effects of GaN channel downscaling in AlGaN–GaN high electron mobility transistor structures grown on AlN bulk substrate;Journal of Applied Physics;2023-04-13
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3. Selective sublimation of GaN and regrowth of AlGaN to co-integrate enhancement mode and depletion mode high electron mobility transistors;Journal of Crystal Growth;2022-09
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