Effect of gamma irradiation on β -Ga2O3 vertical Schottky barrier diode

Author:

Liu Minwei12ORCID,Hua Mingzhuo12ORCID,Tian Xusheng12ORCID,Wang Zhengxing12,Gao Huhu12ORCID,Wang Wentao12ORCID,Chen Yiqiang3ORCID,Zhang Chunfu12ORCID,Zhao Shenglei12ORCID,Feng Qian12ORCID,Hao Yue12ORCID

Affiliation:

1. State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University 1 , Xi'an 710071, China

2. Shaanxi Joint Key Laboratory of Graphene, School of Microelectronics, Xidian University 2 , Xi'an 710071, China

3. Science and Technology on Reliability Physics and Applications Technology of Electronic Component Laboratory 3 , Guangzhou 510000, China

Abstract

In this paper, the radiation effect of gamma irradiation (60Co) on the Au/Ni/β-Ga2O3 vertical Schottky barrier diodes (SBDs) was investigated for total doses of about 1 Mrad (Si). The SBDs were characterized by current density–voltage (J–V) and capacitance–voltage (C–V) measurements. Compared with original β-Ga2O3 SBDs, it was found that Schottky barrier height Φb increases from 1.08 to 1.12 eV, the ideality factor n decreases from 1.07 to 1.02, and the specific on-resistance Ron,sp decreases from 3.34 to 2.95 mΩ·cm2 for the irradiated β-Ga2O3 SBDs. In addition, the carrier concentration calculated from the C–V measurements increases slightly after gamma irradiation. The temperature-dependent current–voltage characteristics and conductance-frequency measurements indicate that the Schottky contact interface of β-Ga2O3 SBDs had been slightly improved after irradiation. These results suggest that β-Ga2O3 SBDs have high intrinsic gamma irradiation hardness.

Funder

National Natural Science Foundation of China

Science and Technology on Reliability Physics and Applications Technology of Electronic Component Laboratory

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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