Effect of metal contacts on the electrical characteristics of Al2O3 dielectric thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2903708
Reference21 articles.
1. Electrical properties of thin rf sputtered aluminum oxide films
2. Thermal Leakage Improvement by Using a High-Work-Function Ni Electrode in High-κ TiHfO Metal–Insulator–Metal Capacitors
3. Atomic Layer Deposited High-κ Films and Their Role in Metal-Insulator-Metal Capacitors for Si RF/Analog Integrated Circuit Applications
4. High-κ gate dielectrics: Current status and materials properties considerations
5. Atomic layer deposition of Al2O3 thin films on diamond
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