Surface roughness and in-plane texturing in sputtered thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368204
Reference14 articles.
1. Combined transmission electron microscopy and x‐ray study of the microstructure and texture in sputtered Mo films
2. Interfacial reactions on annealing molybdenum‐silicon multilayers
3. Crystallographic anisotropy in thin film magnetic recording media analyzed with x‐ray diffraction
4. Interfacial roughness and related growth mechanisms in sputtered W/Si multilayers
5. Theory of thin‐film orientation by ion bombardment during deposition
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