Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology
Author:
Affiliation:
1. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
Funder
National Science Foundation of Hubei Province of China
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5034440
Reference35 articles.
1. Manufacturing considerations for implementation of scatterometry for process monitoring
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