Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Engineering,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s11431-022-2090-4.pdf
Reference124 articles.
1. Vedam K. Spectroscopic ellipsometry: A historical overview. Thin Solid Films, 1998, 313–314: 1–9
2. Aspnes D E. Spectroscopic ellipsometry—Past, present, and future. Thin Solid Films, 2014, 571: 334–344
3. Drude P. Ueber die Gesetze der Reflexion und Brechung des Lichtes an der Grenze absorbirender Krystalle. Ann Phys, 1887, 268: 584–625
4. Rothen A. The ellipsometer, an apparatus to measure thicknesses of thin surface films. Rev Sci Instrum, 1945, 16: 26–30
5. Hauge P S. Recent developments in instrumentation in ellipsometry. Surf Sci, 1980, 96: 108–140
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