Channeled spectroscopic ellipsometry enabled by physics-informed tandem untrained neural networks-Reference-Cited by-同舟云学术

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Channeled spectroscopic ellipsometry enabled by physics-informed tandem untrained neural networks

Published:2024-08 Issue: Volume:235 Page:114940
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Yang Shilong,Chen Xiuguo^ORCID,Chen Wenlong,Hu Jing,Wang Yifu,Liu Shuo,Liu Shiyuan^ORCID

Publisher

Elsevier BV

Reference58 articles.

1. Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization;Garcia-Caurel;Appl. Spectrosc.,2013

2. Spectroscopic ellipsometry—past, present, and future;Aspnes;Thin Solid Films,2014

3. Multi-spectral snapshot diffraction-based overlay metrology;Chen;Opt. Lett.,2023

4. Spectroscopic Ellipsometry: Principles and Applications;Fujiwara,2007

5. Robust and accurate terahertz time-domain spectroscopic ellipsometry;Chen;Photon. Res.,2018

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