Optical properties of thermally annealed hafnium oxide and their correlation with structural change
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2961326
Reference25 articles.
1. Hafnia and hafnia-toughened ceramics
2. Chemical vapor deposition and characterization of HfO2 films from organo-hafnium compounds
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5. Charge trapping related threshold voltage instabilities in high permittivity gate dielectric stacks
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