Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2890100
Reference33 articles.
1. Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge
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4. Positive‐ion bombardment of substrates in rf diode glow discharge sputtering
5. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
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