Modulating the fixed charge density in silicon nitride films while monitoring the surface recombination velocity by photoluminescence imaging-Reference-Cited by-同舟云学术

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Modulating the fixed charge density in silicon nitride films while monitoring the surface recombination velocity by photoluminescence imaging

Published:2015-04-06 Issue:14 Volume:106 Page:143505
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Bazilchuk Molly¹²,Haug Halvard¹,Marstein Erik Stensrud¹³

Affiliation:

1. Institute for Energy Technology, Instituttveien 18, 2007 Kjeller, Norway

2. Department of Electronics and Telecommunications, O.S. Bragstads plass 2a, 7034 Trondheim, Norway

3. Department of Physics, University of Oslo, Pb 1048 Blindern 0316 Oslo, Norway

Funder

Norwegian Metrology Service

Norwegian Research Centre for Solar Techology

University Graduate Centre at Kjeller

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4917518

Reference24 articles.

1. Plasma Si nitride—A promising dielectric to achieve high‐quality silicon MIS/IL solar cells

2. Aluminum-oxide-based inversion layer solar cells on n-type crystalline silicon: Fundamental properties and efficiency potential

3. Predictable quantum efficient detector: I. Photodiodes and predicted responsivity

4. Prospects for improving the accuracy of silicon photodiode self-calibration with custom cryogenic photodiodes

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2. High Performance Predictable Quantum Efficient Detector Based on Induced-Junction Photodiodes Passivated with SiO2/SiNx;Sensors;2021-11-24

3. Enhanced surface passivation of predictable quantum efficient detectors by silicon nitride and silicon oxynitride/silicon nitride stack;Journal of Applied Physics;2018-12-07

4. On the influence of interface charging dynamics and stressing conditions in strained silicon devices;Scientific Reports;2017-08-03

5. Effect of dielectric claddings on the electro-optic behavior of silicon waveguides;Optics Letters;2016-03-10

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