Enhanced surface passivation of predictable quantum efficient detectors by silicon nitride and silicon oxynitride/silicon nitride stack-Reference-Cited by-同舟云学术

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Enhanced surface passivation of predictable quantum efficient detectors by silicon nitride and silicon oxynitride/silicon nitride stack

Published:2018-12-07 Issue:21 Volume:124 Page:214502
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Stokkan Therese Sørheim¹²^ORCID,Haug Halvard³^ORCID,Tang Chi Kwong¹,Marstein Erik Stensrud³,Gran Jarle¹

Affiliation:

1. Justervesenet (JV), P.O. Box 170, 2027 Kjeller, Norway

2. Department of Physics/Center for Materials Science and Nanotechnology, University of Oslo, P.O. Box 1048 Blindern, N-0316 Oslo, Norway

3. Department for Solar Energy, Institute for Energy Technology, P.O. Box 40, 2027 Kjeller, Norway

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5054696

Reference18 articles.

1. Predictable quantum efficient detector: I. Photodiodes and predicted responsivity

2. Predictable quantum efficient detector: II. Characterization and confirmed responsivity

3. Near-unity quantum efficiency of broadband black silicon photodiodes with an induced junction

4. Overview on SiN surface passivation of crystalline silicon solar cells

5. Modulating the fixed charge density in silicon nitride films while monitoring the surface recombination velocity by photoluminescence imaging

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simplified CVD route to near-zero thickness silicon nitride films;Journal of Vacuum Science & Technology B;2022-07

2. High Performance Predictable Quantum Efficient Detector Based on Induced-Junction Photodiodes Passivated with SiO2/SiNx;Sensors;2021-11-24

3. The low-temperature remote-plasma-activated pulsed chemical vapor deposition route to SiNx from 1,3,5-tri(isopropyl)cyclotrisilazane;Thin Solid Films;2020-10

4. Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications;ECS Journal of Solid State Science and Technology;2020-01-08

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