Increasing permittivity in HfZrO thin films by surface manipulation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3195623
Reference16 articles.
1. Thermodynamic stability of binary oxides in contact with silicon
2. Structural, electronic, and dielectric properties of amorphousZrO2fromab initiomolecular dynamics
3. Hafnia and hafnia-toughened ceramics
4. Physical and Electrical Properties of Hafnium–Zirconium–Oxide Films Grown by Atomic Layer Deposition
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