Correlation of charge transport to intrinsic strain in silicon oxynitride and Si-rich silicon nitride thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1639132
Reference24 articles.
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3. Silicon Oxynitride Films from the NO-NH[sub 3]-SiH[sub 4] Reaction
4. Physicochemical Properties of Chemical Vapor‐Deposited Silicon Oxynitride from a SiH4 ‐ CO 2 ‐ NH 3 ‐ H 2 System
5. Current Transport and Maximum Dielectric Strength of Silicon Nitride Films
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