Evidence of Plasticity‐Driven Conductivity Drop in an Ultra‐Low‐k Dielectric Organosilicate Glass-Reference-Cited by-同舟云学术

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Evidence of Plasticity‐Driven Conductivity Drop in an Ultra‐Low‐k Dielectric Organosilicate Glass

Published:2022-09-11 Issue:47 Volume:32 Page:2207354
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv Funct Materials

Author:

Rusinowicz Morgan¹^ORCID,Volpi Fabien¹^ORCID,Parry Guillaume¹^ORCID,Braccini Muriel¹^ORCID,Boujrouf Chaymaa¹,Verdier Marc¹^ORCID

Affiliation:

1. Universite Grenoble Alpes, CNRS, Grenoble INP SIMaP laboratory 1130 Rue de la Piscine 38402 Saint‐Martin‐d'Hères France

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adfm.202207354

Reference97 articles.

1. VLSI on-chip interconnection performance simulations and measurements

2. Low Dielectric Constant Materials for ULSI Interconnects

3. Low-k dielectric materials

4. Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

5. Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Linker engineering of larger POSS-based ultra-low-k dielectrics toward outstanding comprehensive properties;Giant;2023-06

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