Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas-Reference-Cited by-同舟云学术

Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

Published:2019-08 Issue:8 Volume:26 Page:083505
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Saikia Partha¹²^ORCID,Bhuyan Heman²^ORCID,Yap Seong Ling¹^ORCID,Escalona Miguel²,Favre Mario²^ORCID,Wyndham Edmund²,Schulze Julian³⁴

Affiliation:

1. Plasma Technology Research Centre, Physics Department, University of Malaya, 50603 Kuala Lumpur, Malaysia

2. Institute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, Chile

3. Department of Electrical Engineering, Ruhr University Bochum, Bochum 44780, Germany

4. Department of Physics, West Virginia University, Morgantown, West Virginia 26506, USA

Funder

US national Science Foundation

Deutsche Forschungsgemeinschaft

Fondo Nacional de Desarrollo Científico y Tecnológico

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5094603

Reference27 articles.

1. Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources

2. Secondary electrons in rf and dc/rf capacitive discharges

3. Control of ion energy distribution at substrates during plasma processing

4. Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources

5. Electrostatic modelling of dual frequency rf plasma discharges

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