The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range-Reference-Cited by-同舟云学术

The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range

Published:2021-12-01 Issue:12 Volume:11 Page:125003
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Bouza Z.¹^ORCID,Byers J.²^ORCID,Scheers J.¹³^ORCID,Schupp R.¹^ORCID,Mostafa Y.¹,Behnke L.¹,Mazzotta Z.¹^ORCID,Sheil J.¹^ORCID,Ubachs W.¹³^ORCID,Hoekstra R.¹⁴^ORCID,Bayraktar M.²^ORCID,Versolato O. O.¹³^ORCID

Affiliation:

1. Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands

2. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, Drienerlolaan 5, 7522 NB Enschede, The Netherlands

3. Department of Physics and Astronomy, and LaserLaB, Vrije Universiteit, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands

4. Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands

Funder

European Research Council Starting Grant

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0073839

Reference64 articles.

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5. Droplet-based, high-brightness extreme ultraviolet laser plasma source for metrology

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