The wide spectral range characteristics and dynamic evolution of laser-produced tin plasmas-Reference-Cited by-同舟云学术

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The wide spectral range characteristics and dynamic evolution of laser-produced tin plasmas

Published:2024-11 Issue: Volume:326 Page:109120
ISSN:0022-4073
Container-title:Journal of Quantitative Spectroscopy and Radiative Transfer
language:en
Short-container-title:Journal of Quantitative Spectroscopy and Radiative Transfer

Author:

Gao Yaqing,Su Maogen^ORCID,He Siqi,Lu Haidong,Liu Xingbang,Wu Yanhong,Cao Shiquan,Min Qi,Sun Duixiong,Dong Chenzhong

Publisher

Elsevier BV

Reference24 articles.

1. Physical processes in EUV sources for microlithography;Banine;J Phys D Appl Phys,2011

2. TECHNOLOGY. Physics of laser-driven tin plasma sources of EUV radiation for nanolithography;Versolato;Plasma Sources Sci Technol,2019

3. High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model;Hemminga;Plasma Sources Sci Technol,2021

4. Research progress and development trend of extreme ultraviolet lithography source;Lin;Laser Optoelectron Prog,2022

5. Optimization of extreme ultraviolet emission from laser-produced tin plasmas based on radiation hydrodynamics simulations;Sunahara;Plasma Fusion Res,2008

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