In situ sensitive measurement of stress in thin films
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1142567
Reference6 articles.
1. Measurements of the intrinsic stress in thin metal films
2. Mechanical stresses in (sub)monolayer epitaxial films
3. Thin film stress from nonspherical substrate bending measurements
4. Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history
5. Stresses in TaSixfilms sputter deposited on polycrystalline silicon
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2. A new method for high resolution curvature measurement applied to stress monitoring in thin films;Nanotechnology;2022-01-11
3. In Situ Stress Measurement of Ni Electrodeposition Using Lateral Shearing Interferometry;Journal of The Electrochemical Society;2020-12-01
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