O interstitial generation and diffusion in high temperature annealed Si/SiO2/Si structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.361155
Reference25 articles.
1. Annealing of surface states in polycrystalline‐silicon–gate capacitors
2. Process Optimization of Radiation-Hardened CMOS Integrated Circuits
3. Evidence that similar point defects cause 1/fnoise and radiation-induced-hole trapping in metal-oxide-semiconductor transistors
4. Trapping and trap creation studies on nitrided and reoxidized‐nitrided silicon dioxide films on silicon
5. Moderate‐temperature anneal of 7‐nm thermal SiO2in O2‐ and H2O‐free atmosphere: Effects on Si‐SiO2interface‐trap distribution
Cited by 42 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two-step ALD process for non-oxide ceramic deposition: the example of boron nitride;Journal of Physics: Materials;2024-06-27
2. Monolithic integration of InP nanowires with CMOS fabricated silicon nanotips wafer;Physical Review Materials;2023-10-19
3. Thermal annealing effects on tunnel oxide passivated hole contacts for high-efficiency crystalline silicon solar cells;Scientific Reports;2022-09-02
4. Monolithic and catalyst-free selective epitaxy of InP nanowires on Silicon;2022-08-09
5. Impurity Gettering in Polycrystalline‐Silicon Based Passivating Contacts—The Role of Oxide Stoichiometry and Pinholes;Advanced Energy Materials;2022-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3