Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2142247
Reference19 articles.
1. Analytic model for a dual frequency capacitive discharge
2. A simple model of an asymmetric capacitive plasma with dual frequency
3. Analytical model of a dual frequency capacitive sheath
4. Modelling of the dual frequency capacitive sheath in the intermediate pressure range
5. The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction
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2. Numerical simulation of the argon dielectric barrier discharge driven by dual frequency at atmospheric pressure;AIP Advances;2023-06-01
3. Diagnostic study of argon and oxygen mixtures in dual-frequency capacitively coupled plasmas using quadrupole mass spectrometer;Chemical Physics Letters;2019-09
4. A computing model of ion energy distributions for dual frequencies capacitive couple discharges;Journal of Physics: Conference Series;2016-08
5. Ion energy distribution function measurements by laser-induced fluorescence in a dual radio frequency sheath;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-03
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