Molecular beam epitaxial regrowth oninsituplasma‐etched AlAs/AlGaAs heterostructures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107202
Reference16 articles.
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3. Surface pattern evolution during thermal Cl2 etching of GaAs(001);Applied Physics Letters;2003-06-23
4. Dry etching and consequent burring regrowth of nanosize quantum wells stripes using an in situ ultrahigh vacuum multichamber system;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01
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