Effects of the wall boundary conditions of a showerhead plasma reactor on the uniformity control of RF plasma deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4996998
Reference40 articles.
1. Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges
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4. Incorporating the gas flow in a numerical model of rf discharges in methane
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