Effects of the Electrode Temperature on Spatial Distributions of Plasma Parameters in Intermediate Pressure Capacitively Coupled Plasmas-Reference-Cited by-同舟云学术

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Effects of the Electrode Temperature on Spatial Distributions of Plasma Parameters in Intermediate Pressure Capacitively Coupled Plasmas

Published:2020-12-06 Issue: Volume: Page:
ISSN:
Container-title:2020 IEEE International Conference on Plasma Science (ICOPS)
language:
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Author:

Kim Ho Jun¹,Kim Jin Seok²,Park Geonwoo³,Lee Hae June³

Affiliation:

1. Gachon University,Department of Mechanical Engineering,Sungnam Si,Gyeonggi-do,Republic of Korea,13120

2. Tokyo Electron Technology Solutions Ltd.,Simulation Technology Development Department,Yamanashi,Japan,407-8511

3. Pusan National University,Department of Electrical Computer Engineering,Busan,Republic of Korea,46241

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9717337/9717345/09717666.pdf?arnumber=9717666

Reference1 articles.

1. Effects of the wall boundary conditions of a showerhead plasma reactor on the uniformity control of RF plasma deposition

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