Alteration of Ni silicide formation by N implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.92259
Reference3 articles.
1. Influence of the nature of the Si substrate on nickel silicide formed from thin Ni films
2. On the formation of Ni and Pt silicide first phase: The dominant role of reaction kinetics
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1. The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture;Journal of Applied Physics;2018-05-14
2. Nitrogen enhanced thermal stability of nickel monosilicide;physica status solidi (a);2017-01-10
3. A Study on the Electrodeposition and Silicidation of Nickel-Cobalt Alloys for Silicon Photovoltaic Cell Metallization;ECS Journal of Solid State Science and Technology;2015-11-21
4. Role of the early stages of Ni-Si interaction on the formation of transrotational Ni-silicides;physica status solidi (c);2013-11-25
5. Role of the early stages of Ni-Si interaction on the structural properties of the reaction products;Journal of Applied Physics;2013-09-28
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