On the formation of Ni and Pt silicide first phase: The dominant role of reaction kinetics
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90269
Reference13 articles.
1. Analysis of thin-film structures with nuclear backscattering and x-ray diffraction
2. Selective growth of metal‐rich silicide of near‐noble metals
3. Solid‐Solid Reactions in Pt–Si Systems
4. Kinetics and mechanism of platinum silicide formation on silicon
5. LOW‐TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM
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