1. Institute of Microelectronics Technology and High-Purity Materials Russian Academy of Sciences, Academician Ossipyan str. 6, Chernogolovka, Moscow Region, 142432, Russia
2. Bruker Nano Surface Division, Pyatnitskaya str. 50/2, build. 1, Moscow 119017, Russia
3. Physical-Technical Research Institute, University of Nizhni Novgorod, pr. Gagarina 23/3, Nizhni Novgorod 603950, Russia