Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb(Zr,Ti)O3 thin film
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2736296
Reference12 articles.
1. PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS
2. Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning
3. Microelectromechanical flexure PZT actuated optical scanner: static and resonance behavior
4. Fabrication of Optical Micro Scanner Driven by PZT Actuators
5. High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O3Thick Films Formed by Aerosol Deposition
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