Author:
Kobayashi Takeshi,Tsaur Jiunnjye,Maeda Ryutaro
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
65 articles.
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1. Thermal Behavior of Biaxial Piezoelectric MEMS Scanner;Eurosensors 2023;2024-06-14
2. A Lumped Element model for biaxial MEMS scanners;2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2024-04-07
3. Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR;Micromachines;2023-05-09
4. Piezoelectric MEMS;3D and Circuit Integration of MEMS;2021-04-23
5. Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-01-14