PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS-Reference-Cited by-同舟云学术

PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS

Published:2006-11 Issue:1 Volume:80 Page:341-353
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

YASUDA Y.¹,AKAMATSU M.¹,TANI M.¹,IIJIMA T.²,TOSHIYOSHI H.³

Affiliation:

1. a R&D Center, Stanley Electric Co. Ltd., 1-3-1 Eda-nishi , Aoba, Yokohama, 225-0014, Japan

2. b Research Institute of Instrumentation Frontier, AIST, AIST Tsukuba Central 2 , Tsukuba, 305-8568, Japan

3. c Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba , Meguro, Tokyo, 153-8505, Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580600660140

Reference13 articles.

1. A MEMS-based projection display

2. Lucent Microstar micromirror array technology for large optical crossconnects

3. Performance of a biaxial MEMS-based scanner for microdisplay applications

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