Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning-Reference-Cited by-同舟云学术

Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

Published:2005-09 Issue: Volume:123-124 Page:483-489
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Filhol F.,Defaÿ E.,Divoux C.,Zinck C.,Delaye M.-T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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2. A flat high frequency scanning micromirror;Conant,2000

3. A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges;Miyajima;IEEE J. Microelectromech. Syst.,2001

4. A fast, robust and simple 2D micro-optical scanner based on contactless magnetostrictive actuation;Garnier,2000

5. A novel asymmetric silicon micro-mirror for optical beam scanning display;Yamada,1998

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